Apparatus and method for measuring a shape using m

专利名称：Apparatus and method for measuring a

shape using multiple probes

发明人：Masaru Ohtsuka申请号：US10086399申请日：20020228

公开号：US20020148130A1公开日：20021017

专利附图：

摘要：There is provided a shape measuring apparatus which defines an XYZ-axiscoordinate and measures a surface shape of an object, the apparatus including a pluralityof probes arranged in a Y-axis direction, the probes contacting a surface of the object,

and moving in a Z-axis direction according to the surface shape of the object, a probeholder for holding each of the plurality of probes movable in the Z-axis direction, amoving mechanism for moving the probe holding mechanism in an X-axis directionrelative to the object, first and second measuring instruments for measuring positions ofeach probe in the X-axis and Y-axis directions, a third measuring instrument for measuringa position of each probe in the Z-axis direction; and a computing unit for calculating thesurface shape of the object based on measuring results from the first, second, and thirdmeasuring instruments.

申请人：OHTSUKA MASARU

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